EB Gun for Metal Vapor Deposition EGN Series
This is an electron beam evaporation source developed with a focus on improving maintainability for metal deposition. 【ULVAC】
The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.
- Company：アルバック／ULVAC, Inc.
- Price：Other
